Method for implant productivity enhancement

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Peter F. Kurunczi (47 patents)
• Bon-Woong Koo (78 patents)
• John A. Frontiero (10 patents)
• William T. Levay (2 patents)
• Christopher J. Leavitt (16 patents)
• Timothy J. Miller (48 patents)
• Vikram M. Bhosle (15 patents)
• John W. Graff (41 patents)
• Nicholas PT Bateman (5 patents)

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