MEMS structure with adjustable ventilation openings

Assignee

• Infineon Technologies Ag

Inventors

• Alfons Dehe (159 patents)
• Matthias Herrmann (43 patents)
• Ulrich Krumbein (36 patents)
• Stefan Barzen (46 patents)
• Wolfgang Klein (66 patents)
• Wolfgang Friza (22 patents)
• Martin Wurzer (11 patents)

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