Membrane support for dual backplate transducers

Assignee

• Infineon Technologies Ag

Inventors

• Wolfgang Klein (66 patents)
• Evangelos Angelopoulos (4 patents)
• Stefan Barzen (46 patents)
• Marc Fueldner (38 patents)
• Stefan Geißler (1 patents)
• Matthias Herrmann (43 patents)
• Ulrich Krumbein (36 patents)
• Konstantin Tkachuk (4 patents)
• Giordano Tosolini (5 patents)
• Juergen Wagner (28 patents)

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