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Home › Pressure sensing and control for semiconductor wafer probing

Pressure sensing and control for semiconductor wafer probing

US Patent 8963567 · Granted Feb 24, 2015

Estimated economic value: $3,851,000 ⓘ

Assignee

IBM

Inventors

Robert D. Edwards (11 patents)
Oleg Gluschenkov (257 patents)
Louis V. Medina (4 patents)
Tso-Hui Ting (15 patents)
Ping-Chuan Wang (205 patents)
Yongchun Xin (16 patents)

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