Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluid handling structure, lithographic apparatus and a device manufacturing method

Fluid handling structure, lithographic apparatus and a device manufacturing method

US Patent 8638417 · Granted Jan 28, 2014

Estimated economic value: $5,623,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature conditioning system, a lithographic apparatus and a method of temper2025
Contamination trap2024
Contamination trap2023
Device manufacturing method and computer program2022
Fluid handling structure, lithographic apparatus and device manufacturing method2021
Fluid handling structure, lithographic apparatus and device manufacturing method2021
Fluid handling structure, lithographic apparatus and device manufacturing method2021
Lithographic apparatus2020
Lithographic apparatus2020
Lithographic apparatus2020
Lithographic apparatus and device manufacturing method2019
Lithographic apparatus and device manufacturing method2019