Device manufacturing method and computer program

Assignee

• Asml Netherlands B.V.

Inventors

• Giovanni Luca Gattobigio (24 patents)
• Pieter Jeroen Johan Emanuel Hoefnagels (2 patents)
• Ronald Frank KOX (5 patents)
• Marcus Johannes Van Der Zanden (6 patents)
• Maarten Marinus Van Oene (1 patents)
• Jorge Alberto Vieyra Salas (12 patents)

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