Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and systems for improved localized feature quantification in surface metrology tools

Methods and systems for improved localized feature quantification in surface metrology tools

US Patent 8630479 · Granted Jan 14, 2014

Estimated economic value: $16,270,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Nursing bottle2025
Polymer-stabilized liquid crystal composition and use thereof2024
Process-induced distortion prediction and feedforward and feedback correction of2023
Process-induced distortion prediction and feedforward and feedback correction of2023
Multi-wavelength interferometry for defect classification2021
Prediction based chucking and lithography control optimization2020
Scanning differential interference contrast in an imaging system design2020
Liquid crystal composition and its application2020
Patterned wafer geometry measurements for semiconductor process controls2020
Transparent film error correction pattern in wafer geometry system2020
Liquid crystal composition and application thereof2020
Liquid crystal composition containing 2-methyl-3,4,5-trifluorobenzene liquid cry2019