Radiation system and lithographic apparatus

Assignee

• Asml Netherlands B.V.

Inventors

• Erik Roelof Loopstra (328 patents)
• Vladimir Vitalevich Ivanov (16 patents)
• Johannes Hubertus Josephina Moors (92 patents)
• Gerardus Hubertus Petrus Maria Swinkels (34 patents)
• Andrei Mikhailovich Yakunin (35 patents)
• Dennis De Graaf (12 patents)
• Uwe Stamm (64 patents)

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