Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus

Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus

US Patent 8317929 · Granted Nov 27, 2012

Estimated economic value: $20,130,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic system provided with a deflection apparatus for changing a trajecto2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Lithographic apparatus and electrostatic clamp designs2024
Lithographic apparatus2024
Lithographic apparatus2024
Prolonging optical element lifetime in an EUV lithography system2023
Prolonging optical element lifetime in an EUV lithography system2022
Lithographic apparatus2022
Lithographic apparatus comprising an object with an upper layer having improved 2021
Component for use in a patterning device environment2021
Sensor mark and a method of manufacturing a sensor mark2021
Radiation sensor apparatus2021