Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8317929 | Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus | Tatyana Victorovna Rakhimova, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevitch Koshelev, Johannes Hubertus Josephina Moors +1 more | 2012-11-27 |
| 7872244 | Lithographic apparatus and device manufacturing method | Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Arno Jan Bleeker, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov +1 more | 2011-01-18 |