Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method of aligning and positioning a cold substrate on a hot surface

Apparatus and method of aligning and positioning a cold substrate on a hot surface

US Patent 8097543 · Granted Jan 17, 2012

Estimated economic value: $12,497,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for forming films on substrates2025
Apparatus and method for controlling a flow process material to a deposition cha2025
System and method for radical and thermal processing of substrates2025
Treatment methods for titanium nitride films2025
Doping techniques2025
Systems, methods, and apparatus for correcting thermal processing of substrates2024
Methods of using a segmented showerhead for uniform delivery of multiple pre-cur2024
Chemical mechanical polishing for copper dishing control2024
Thermal chamber with improved thermal uniformity2024
Showerhead for providing multiple materials to a process chamber2024
Annealing apparatus using two wavelengths of radiation2024
Catalyst enhanced molybdenum deposition and gap fill2024