Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hot edge ring with sloped upper surface

Hot edge ring with sloped upper surface

US Patent 8084375 · Granted Dec 27, 2011

Estimated economic value: $4,468,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Hollow cathode, an apparatus including a hollow cathode for manufacturing a semi2023
Confinement ring for use in a plasma processing system2023
Plasma processing apparatus and method of manufacturing semiconductor device usi2022
Confinement ring for use in a plasma processing system2022
Electron beam generator, plasma processing apparatus having the same and plasma 2021
Plasma processing apparatus and method of manufacturing semiconductor device usi2021
Plasma etching apparatus and method2020
Plasma processing apparatus and method2020
Confinement ring for use in a plasma processing system2020
Plasma processing apparatus and method2020
Plasma processing apparatus and method2020
Capacitive coupling plasma processing apparatus and method for using the same2020