Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Capacitive coupling plasma processing apparatus and method for using the same

Capacitive coupling plasma processing apparatus and method for using the same

US Patent 10529596 · Granted Jan 7, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wheeze detection apparatus, wheeze detection method, and wheeze detection progra2025
Plasma processing method and plasma processing apparatus2025
Biological sound measuring device, biological sound measurement support method, 2025
Plasma processing apparatus and substrate processing method2025
Wheezing detection device and wheezing detection program2025
Magnetic marker set and method of arranging magnetic marker2025
Plasma processing apparatus and method for controlling source frequency of sourc2025
Plasma processing apparatus2025
Plasma processing apparatus2025
Substrate support and substrate processing apparatus2025
Plasma processing apparatus and plasma processing method2025
Plasma processing apparatus and plasma processing method2025