Assignee
- National Institute Of Advanced Industrial Science And Technology
- Canon
- Ulvac
- Sanyo Electric Co.
- Sony
- Tokyo Electron Limited
- Hitachi Kokusai Electric
- Renesas Electronics
- Fujitsu Semiconductor Limited
Inventors
- Katsuo Sakai (35 patents)
- Kaoru Abe (29 patents)
- Seiji Okura (35 patents)
- Masaji Sakamura (4 patents)
- Hitoshi Murata (31 patents)
- Kenji Kameda (31 patents)
- Etsuo Wani (5 patents)
- Akira Sekiya (20 patents)