Image processing unit for wafer inspection tool

Assignee

• Hitachi High-Technologies

Inventors

• Michio Nakano (6 patents)
• Shigeya Tanaka (42 patents)
• Yoshiyuki Momiyama (2 patents)
• Takashi Hiroi (83 patents)
• Kazuya Hayashi (20 patents)
• Dai Fujii (10 patents)
• Takako Fujisawa (3 patents)
• Atsushi Ichige (8 patents)
• Ichiro Kawashima (12 patents)

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