Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holder and device manufacturing method

Substrate holder and device manufacturing method

US Patent 7494828 · Granted Feb 24, 2009

Estimated economic value: $6,233,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for optimizing a lithography exposure process2022
System and method for optimizing a lithography exposure process2021
Radiation modulator for a lithography apparatus, a lithography apparatus, a meth2017
Lithographic apparatus and device manufacturing method2014
Lithographic apparatus and method2013
Lithographic apparatus and method2013
Device manufacturing method and substrate comprising multiple resist layers2011
Lithographic method and patterning device2011
Lithographic apparatus and method2009
Lithographic apparatus and device manufacturing method2009
Method and system for 3D alignment in wafer scale integration2009
Resist recovery method2009