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Home › Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method

Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method

US Patent 9823576 · Granted Nov 21, 2017

Estimated economic value: $9,805,000 ⓘ

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