Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program

Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program

US Patent 7184849 · Granted Feb 27, 2007

Estimated economic value: $3,038,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Contaminant analyzing metrology system, lithographic apparatus, and methods ther2025
Method of determining a mark measurement sequence, stage apparatus and lithograp2025
Spray boom height control system2024
Substrate support, lithographic apparatus and loading method2024
Systems and methods for adjusting prediction models between facility locations2024
Apparatus and methods for filtering metals2024
Lithographic method2023
Substrate support, lithographic apparatus and loading method2023
Apparatus and methods for filtering metals2023
Lithography apparatus, and a method of manufacturing a device2020
Lithography apparatus, a method of manufacturing a device and a control program2020
Apparatus and methods for filtering metals2019