Coating film forming apparatus and coating unit

Assignee

• Tokyo Electron Limited

Inventors

• Takahiro Kitano (113 patents)
• Masateru Morikawa (17 patents)
• Yukihiko Esaki (13 patents)
• Nobukazu Ishizaka (16 patents)
• Norihisa Koga (34 patents)
• Kazuhiro Takeshita (30 patents)
• Hirofumi Ookuma (12 patents)
• Masami Akimoto (103 patents)

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