Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby

Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby

US Patent 6781673 · Granted Aug 24, 2004

Estimated economic value: $5,405,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measuring method and measuring apparatus2025
Vibration isolator for supporting a payload2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Substrate holder and method of manufacturing a substrate holder2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Stage system, lithographic apparatus, method for positioning and device manufact2025
Calibration system for an extreme ultraviolet light source2024
Lithographic apparatus and electrostatic clamp designs2024
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus2024
Lithographic apparatus2024