Shallow trench isolation planarization using self aligned isotropic etch

Assignee

• Texas Instruments

Inventors

• Shawn T. Walsh (10 patents)
• John E. Campbell (62 patents)
• Somit Joshi (3 patents)
• James B. Friedmann (7 patents)
• Michael J. McGranaghan (1 patents)
• Janice D. Makos (2 patents)
• Arun Sivasothy (1 patents)
• Troy A. Yocum (6 patents)
• Jaideep Mavoori (14 patents)
• Wayne Bather (7 patents)
• Joe G. Tran (12 patents)
• Ju-Ai Ruan (7 patents)
• Michelle L. Hartsell (7 patents)
• Gregory B. Shinn (17 patents)

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