Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carrier head with layer of conformable material for a chemical mechanical polishing system

Carrier head with layer of conformable material for a chemical mechanical polishing system

US Patent 6443823 · Granted Sep 3, 2002

Estimated economic value: $21,151,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Small batch polishing fluid delivery for CMP2023
Color imaging for CMP monitoring2023
Multi-layered nano-fibrous CMP pads2020
Thin plastic polishing article for CMP applications2020
Color imaging for CMP monitoring2020
Bonding apparatus and method2013
Bonding apparatus and method2012
Chemical mechanical polishing system having multiple polishing stations and prov2011
Apparatus for rapid filling of a processing volume2011
Methods of forming a photovoltaic cell2010
Multilayer polishing pad and method of making2010
Chemical mechanical polishing system having multiple polishing stations and prov2009