Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Color imaging for CMP monitoring

Color imaging for CMP monitoring

US Patent 10565701 · Granted Feb 18, 2020

Estimated economic value: $26,722,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Passive acoustic monitoring and acoustic sensors for chemical mechanical polishi2025
Passive acoustic monitoring and acoustic sensors for chemical mechanical polishi2025
Polishing apparatus using neural network for monitoring2025
Resistivity-based adjustment of thresholds for in-situ monitoring2025
Pixel classification of film non-uniformity based on processing of substrate ima2025
Region classification of film non-uniformity based on processing of substrate im2025
Residue measurement from machine learning based processing of substrate images2025
Machine vision as input to a CMP process control algorithm2025
Machine vision as input to a CMP process control algorithm2025
Polishing system with capacitive shear sensor2025
System using film thickness estimation from machine learning based processing of2024
Thickness measurement of substrate using color metrology2024