Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck with improved erosion resistance

Electrostatic chuck with improved erosion resistance

US Patent 6023405 · Granted Feb 8, 2000

Estimated economic value: $294,888,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imaging systems and methods for image-guided radiosurgery2025
Microstructure control of conducting materials through surface coating of powder2024
Food components having high protein content2024
Therapeutic radiation beam detector for radiation treatment systems2023
Revolving radiation collimator2023
Starch aqueous fermentation feedstock and a method for the production thereo2023
Revolving radiation collimator2021
Integrated mixotrophic fermentation method2021
Self-shielded, integrated-control radiosurgery system2019
Eddy current system having an elongated core for in-situ profile measurement2018
Apparatus and method for control of print gap2018
Apparatus and method for control of print gap2017