Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6023405 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil +2 more | 2000-02-08 |
| 5822171 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred A. Goldspiel +2 more | 1998-10-13 |