Electrostatic chuck with fluid flow regulator

Assignee

• Applied Materials

Inventors

• Semyon Sherstinsky (29 patents)
• John F. Cameron (47 patents)
• Shamouil Shamouilian (68 patents)
• Manoocher Birang (167 patents)
• Alfred Mak (61 patents)
• Simon W. Tam (9 patents)
• Robert E. Ryan (23 patents)

View full patent text on Google Patents →