Substrate conveying device and method of controlling the same

Assignee

• Canon

Inventors

• Mitsutoshi Kuno (20 patents)
• Hidehiko Fujioka (33 patents)
• Nobutoshi Mizusawa (43 patents)
• Yuji Chiba (35 patents)
• Takao Kariya (34 patents)
• Koji Uda (17 patents)
• Shunichi Uzawa (63 patents)
• Eigo Kawakami (46 patents)

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