Substrate processing system including dual ion filter for downstream plasma

Assignee

• Lam Research

Inventors

• Andrew Stratton Bravo (4 patents)
• Chih-Hsun Hsu (14 patents)
• Serge Kosche (3 patents)
• Stephen Whitten (8 patents)
• Shih-Chung Kon (6 patents)
• Mark Kawaguchi (28 patents)
• Himanshu Chokshi (9 patents)
• Dan Zhang (10 patents)
• Gnanamani Amburose (6 patents)

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