Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347650 | Substrate processing system including dual ion filter for downstream plasma | Andrew Stratton Bravo, Chih-Hsun Hsu, Serge Kosche, Stephen Whitten, Shih-Chung Kon +3 more | 2025-07-01 |
| 12057295 | RF power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variations | Wei Luo, Youn Gi Hong, WeiWu ZHONG | 2024-08-06 |
| 11967486 | Substrate processing system including dual ion filter for downstream plasma | Andrew Stratton Bravo, Chih-Hsun Hsu, Serge Kosche, Stephen Whitten, Shih-Chung Kon +3 more | 2024-04-23 |
| 11011355 | Temperature-tuned substrate support for substrate processing systems | Norman Mertke | 2021-05-18 |
| 8902568 | Power supply interface system for a breathing assistance system | Mahmoud Janbakhsh, Mark Van Kerkwyk | 2014-12-02 |
| 6656028 | Method for loading a semiconductor processing system | Ben Ju, Eric Hilton | 2003-12-02 |
| 6648730 | Calibration tool | Bharat Patel | 2003-11-18 |
| 6413356 | Substrate loader for a semiconductor processing system | Ben Ju, Eric Hilton | 2002-07-02 |