Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656028 | Method for loading a semiconductor processing system | Himanshu Chokshi, Eric Hilton | 2003-12-02 |
| 6413356 | Substrate loader for a semiconductor processing system | Himanshu Chokshi, Eric Hilton | 2002-07-02 |