Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Autonomous operation of plasma processing tool

Autonomous operation of plasma processing tool

US Patent 12300477 · Granted May 13, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for edge control during plasma processing2025
Inductively coupled plasma source with radial coil network2025
Plasma processing apparatus with tunable electrical characteristic2025
Pulsed capacitively coupled plasma processes2025
Data fusion of multiple sensors2025
Data fusion of multiple sensors2025
Data fusion of multiple sensors2025
Plasma processing methods using low frequency bias pulses2025
Method of uniformity control2025
Etching of polycrystalline semiconductors2025
Method of forming a FET structure by selective deposition of film on source/drai2025
Process control enabled VDC sensor for plasma process2025