Process control enabled VDC sensor for plasma process

Assignee

• Tokyo Electron Limited

Inventors

• Merritt Funk (105 patents)
• Peter Ventzek (63 patents)
• Alok Ranjan (123 patents)
• Barton Lane (42 patents)
• Justin Moses (11 patents)
• Chelsea DuBose (12 patents)

View full patent text on Google Patents →