Underlayer compositions and patterning methods

Assignee

• Dupont Electronic Materials International

Inventors

• Joshua Kaitz (8 patents)
• Sheng Liu (12 patents)
• Li Cui (24 patents)
• Shintaro Yamada (40 patents)
• James F. Cameron (88 patents)
• Emad Aqad (47 patents)
• Iou-Sheng Ke (8 patents)
• Suzanne M. Coley (38 patents)

View full patent text on Google Patents →