Sequential plasma and thermal treatment

Assignee

• Applied Materials

Inventors

• Ning Li (371 patents)
• Shuaidi Zhang (7 patents)
• Mihaela Balseanu (72 patents)
• Qi Gao (23 patents)
• Rajesh Prasad (22 patents)
• Tomohiko Kitajima (30 patents)
• Chang-Seok Kang (76 patents)
• Deven Matthew Raj Mittal (5 patents)
• Kyu-Ha Shim (18 patents)

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