High-brightness laser produced plasma source and method of generation and collection radiation

Assignee

• Isteq Group Holding B.V.

Inventors

• Samir Ellwi (6 patents)
• Denis Aleksandrovich Glushkov (4 patents)
• Vladimir Vitalievich Ivanov (8 patents)
• Oleg Borisovich Khristoforov (6 patents)
• Konstantin Nikolaevich Koshelev (16 patents)
• Mikhail Sergeyevich Krivokorytov (6 patents)
• Vladimir Mikhailovich Krivtsun (15 patents)
• Aleksandr Andreevich Lash (14 patents)
• Vyacheslav Valerievich Medvedev (7 patents)
• Aleksandr Yurievich Vinokhodov (7 patents)

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