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High-brightness laser produced plasma source and method of generation and collection radiation |
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| 11869742 |
X-ray source with rotating liquid-metal target |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2024-01-09 |
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Short-wavelength radiation source with multisectional collector module and method of collecting radiation |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2022-02-15 |
| 10887973 |
High brightness laser-produced plasma light source |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2021-01-05 |
| 10638588 |
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +3 more |
2020-04-28 |
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High brightness short-wavelength radiation source (variants) |
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2020-03-10 |
| 9476841 |
High-brightness LPP EUV light source |
Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more |
2016-10-25 |