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Home › Low impedance current path for edge non-uniformity tuning

Low impedance current path for edge non-uniformity tuning

US Patent 11929278 · Granted Mar 12, 2024

Estimated economic value: $97,620,000 ⓘ

Assignee

Applied Materials

Inventors

Madhu Santosh Kumar Mutyala (9 patents)
Saketh Pemmasani (3 patents)
Akshay Dhanakshirur (6 patents)
Mayur Govind Kulkarni (20 patents)
Hang Yu (35 patents)
Deenesh Padhi (94 patents)

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