Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System using film thickness estimation from machine learning based processing of substrate images

System using film thickness estimation from machine learning based processing of substrate images

US Patent 11847776 · Granted Dec 19, 2023

Estimated economic value: $56,890,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control substrate polishing using constrained cost function2025
Passive acoustic monitoring and acoustic sensors for chemical mechanical polishi2025
Compensation for substrate doping in edge reconstruction for in-situ electromagn2025
Semiconductor fabrication using process control parameter matrix2025
Control of processing parameters during substrate polishing using cost function2025
Determining substrate precession with acoustic signals2025
Eddy current monitoring to detect vibration in polishing2025
Methods of modeling and controlling pad wear2025
Polishing apparatus using machine learning and compensation for pad thickness2025
Autonomous lane change method and apparatus, and storage medium2025
Generating synthetic training data including document images with key-value pair2025
Multi-stage machine learning model training for key-value extraction2025