Silicon-containing underlayers

Assignee

• Rohm And Haas Electronic Materials

Inventors

• Charlotte Cutler (13 patents)
• Li Cui (24 patents)
• Shintaro Yamada (40 patents)
• Paul J. LaBeaume (27 patents)
• Suzanne M. Coley (38 patents)
• James F. Cameron (88 patents)
• Daniel Greene (9 patents)

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