Extreme ultraviolet (EUV) collector inspection apparatus and method

Assignee

• Samsung

Inventors

• Dong-Hyub Lee (3 patents)
• Kyungsik Kang (3 patents)
• Jeong Gil Kim (14 patents)
• Jinyong Kim (29 patents)
• Hochul Kim (2 patents)
• Yozo Matsuda (3 patents)
• Youngduk Suh (3 patents)
• Seungkoo Lee (7 patents)
• Sungho Jang (21 patents)
• Yoojin Jeong (2 patents)

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