Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399429 | Semiconductor fabrication apparatus | Ohkug Kwon, Sanghun Kim, Junghwan Kim, Sangbeom Park, Jinwook Jung +3 more | 2025-08-26 |
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Hoonseop KIM +3 more | 2024-03-26 |
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Dong-Hyub Lee, Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim +4 more | 2023-06-13 |