Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Dong-Hyub Lee, Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim +4 more | 2023-06-13 |
| 11488875 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Junbum Park, Younghwan Kim, Jongsu Kim, Youngjoo Lee | 2022-11-01 |