Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Load lock with integrated features

Load lock with integrated features

US Patent 11557496 · Granted Jan 17, 2023

Estimated economic value: $39,427,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shield ring mounting using compliant hardware2025
Model-based controlled load lock pumping scheme2025
Cover ring to mitigate carbon contamination in plasma doping chamber2024
System apparatus and method for enhancing electrical clamping of substrates usin2024
System for isolating electrodes at cryogenic temperatures2023
Method and apparatus for calibration of substrate temperature using pyrometer2023
Method and apparatus for calibration of substrate temperature using pyrometer2023
Hybrid control system for workpiece heating2023
Thermally isolated captive features for ion implantation systems2022
System apparatus and method for enhancing electrical clamping of substrates usin2022
Enhanced substrate temperature measurement apparatus, system and method2022
Enhanced substrate temperature measurement apparatus, system and method2022