Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System for isolating electrodes at cryogenic temperatures

System for isolating electrodes at cryogenic temperatures

US Patent 11651986 · Granted May 16, 2023

Estimated economic value: $64,199,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System apparatus and method for enhancing electrical clamping of substrates usin2024
System apparatus and method for enhancing electrical clamping of substrates usin2024
Load lock with integrated features2023
Method and apparatus for calibration of substrate temperature using pyrometer2023
System apparatus and method for enhancing electrical clamping of substrates usin2022
System apparatus and method for enhancing electrical clamping of substrates usin2022
Enhanced substrate temperature measurement apparatus, system and method2022
System apparatus and method for enhancing electrical clamping of substrates usin2022
System apparatus and method for enhancing electrical clamping of substrates usin2022
Carbon nanotube electrostatic chuck2021
Hydrophobic shafts for use in process chambers2021
Thermally insulating electrical contact probe2020