Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hydrophobic shafts for use in process chambers

Hydrophobic shafts for use in process chambers

US Patent 10974276 · Granted Apr 13, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Active temperature control for RF window in immersed antenna source2024
System apparatus and method for enhancing electrical clamping of substrates usin2024
System for isolating electrodes at cryogenic temperatures2023
System apparatus and method for enhancing electrical clamping of substrates usin2022
Transparent halo assembly for reduced particle generation2022
System apparatus and method for enhancing electrical clamping of substrates usin2022
Ion source chamber with embedded heater2021
Lift pin system for wafer handling2020
Hydrophobic shafts for use in process chambers2020
Hydrophobic shafts for use in process chambers2020
Hydrophobic shafts for use in process chambers2020
Transparent halo for reduced particle generation2019