Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › 3D NAND etch

3D NAND etch

US Patent 11515170 · Granted Nov 29, 2022

Estimated economic value: $23,914,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pulsed plasma (DC/RF) deposition of high quality C films for patterning2025
Pulsed plasma (DC/RF) deposition of high quality C films for patterning2025
Processes for depositing SiB films2025
Processes for depositing SiB films2025
L-type wordline connection structure for three-dimensional memory2025
Three dimensional memory device and method of fabrication2025
High density carbon films for patterning applications2025
High density carbon films for patterning applications2025
NAND cell structure with charge trap cut2025
Forming a doped hardmask2025
Forming a doped hardmask2025
Electronic device fabrication using area-selective deposition2025