Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor substrate supports with improved high temperature chucking

Semiconductor substrate supports with improved high temperature chucking

US Patent 11501993 · Granted Nov 15, 2022

Estimated economic value: $47,599,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Interlock system for processing chamber exhaust assembly2025
External recirculation for gas lock relief2025
AFE (active far edge) heater/bipolar ESC with simplified and optimized structure2025
Showerhead design to control stray deposition2025
PECVD of SiBN thin films with low leakage current2025
Systems and methods for substrate support temperature control2025
Silicon oxide gap fill using capacitively coupled plasmas2025
Prophy angle with splatter guard2025
Impedance control of local areas of a substrate during plasma deposition thereon2025
Systems and methods of seasoning electrostatic chucks with dielectric seasoning 2025
One way clutch train for arresting backspin2025
Shaped showerhead for edge plasma modulation2025