Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Metal line patterning

Metal line patterning

US Patent 11404314 · Granted Aug 2, 2022

Estimated economic value: $46,822,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

L-type wordline connection structure for three-dimensional memory2025
Three dimensional memory device and method of fabrication2025
Three-dimensional dynamic random-access memory (3D DRAM) gate all-around (GAA) d2025
Techniques and device structures based upon directional dielectric deposition an2025
Techniques and device structures based upon directional dielectric deposition an2025
Reaction cell for species sensing2025
Nucleation-free gap fill ALD process2025
Methods and apparatus for processing a substrate2025
Stress and overlay management for semiconductor processing2025
Deposition of conformal and gap-fill amorphous silicon thin-films2025
Deposition of semiconductor integration films2025
Photoresist deposition using independent multichannel showerhead2025