Method of manufacturing a superjunction semiconductor device

Assignee

• Infineon Technologies Austria Ag

Inventors

• Armin Tilke (43 patents)
• Hans Weber (113 patents)
• Christian Fachmann (30 patents)
• Roman Knoefler (25 patents)
• Gabor Mezoesi (12 patents)
• Manfred Pippan (9 patents)
• Thomas Rupp (18 patents)
• Michael Treu (33 patents)
• Armin Willmeroth (118 patents)

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