Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for measurement of alignment

System and method for measurement of alignment

US Patent 11249404 · Granted Feb 15, 2022

Estimated economic value: $79,085,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for optimizing a sampling scheme and associated apparatuses2025
Computational metrology2025
Metrology method, target and substrate2025
Method for determining defectiveness of pattern based on after development image2025
Method in the manufacturing process of a device, a non-transitory computer-reada2025
Substrate comprising a target arrangement, and associated at least one patternin2025
Selection of measurement locations for patterning processes2025
Method for determining a measurement recipe and associated apparatuses2025
Method and apparatus for inspection and metrology2025
Method of determining control parameters of a device manufacturing process2025
Computational metrology2025
Computational metrology2025